I will be opening up the air flow meter on my 1984 Mazda RX-7 GSL-SE this Friday to inspect and clean it. I figured I might as well do I write up on it. The Air Flow Meter or Vane Airflow VAF Sensor was the second generation EFI metering system. "Vane airflow sensors are found mostly on German imports equipped with Bosch L-Jetronic fuel injection, Japanese imports equipped with Nippondenso multiport electronic fuel injection (made under Bosch license), and Ford vehicles equipped with the Bosch multiport EFI." http://www.aa1car.com/library/vaf_sensors.htm The Mass Airflow MAF Sensor replaced the VAF in the '90s.

Links on cleaning the meter:
http://www.miata.net/garage/afm_fix.html
http://paulaxford.com/html/bmw730i/afm_service.htm